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Home > Micro-mirror with Elastomeric Universal Joint Fabr...(TF14157)

Micro-Mirror with Elastomeric Universal Joint Fabricated via Micro-Masonry

Micro-mirror with Elastomeric Universal Joint Fabr...(TF14157) [1]

 

Dr. Seok Kim from the University of Illinois has developed a method to fabricate a silicon-based MEMS mirror and its elastomeric universal joint. This method, termed micro-masonry, can be extended to integrate elastomer and silicon components, thus enabling strong mechanical and electrical connections between two heterogeneous materials without causing the damage of elastomer. As a result, the fabricated device could exhibit 3D motion in a compact gimballess design.

Seok
Kim

Inventors:

US Pat #: 
TF14157
Issue Date: 
11/21/2017
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